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2'' sapphire wafer
2'' sapphire wafer
2'' sapphire wafer
 Standard Specifications of Sapphire Substrate
 Item  Specification
 2’’
 Material  High Purity,Monocrystaline,AL2O3
 Diameter  50.8mm~51.0mm
 Thickness  420-440μm
 Orientation  C-plane (0001)off angle 0.2° ± 0.1°(M-axis); 0± 0.1°(A-axis)
 Flat length  16±1 mm  or according to customer required
 Flat Location  A-axis[11-20]±0.2°
 Front Side Surface  Epi-Ready Polished
 Roughness of front side surface  Ra<2Å(0.2 nm)
 Back side surface  Standard  60/40
 Edge Chamfering  T-type/R-type
 TTV  ≤5μm(FRT 3/25)
 LTV  5mm*5mm≤1.5μm
 BOW  |Bow|≤3 μm
 Sapphire  Optics 
 
 Manufacture Specifications
 Dia.:2mm to 300mm+/-0.05
 Orientation: C plane, R plane, A plane, M plane
 Polish: single polish, double polish, no polish
 Shape: Circle, Square, Rectangular, With hole, according to customer’s drawing.
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